Enhanced piezoelectric performance of the ZnO/AlN stacked nanofilm nanogenerator grown by atomic layer deposition
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چکیده
منابع مشابه
(Sn,Al)Ox Films Grown by Atomic Layer Deposition
Tin oxide (SnO2) is a transparent semiconductor with a wide band gap and electrical resistivity as low as 2 10 4 Ω 3 cm and high infrared reflectivity, over 90%. 4 These properties are achieved using n-type doping by substituting fluorine for about 1% of the oxygen. The low electrical resistance and optical transparency in SnO2 are widely used in applications such as solar cells, displays, touc...
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ژورنال
عنوان ژورنال: APL Materials
سال: 2018
ISSN: 2166-532X
DOI: 10.1063/1.5057889